Truth Instruments Co., Ltd.
Empowering Scientific Innovation with Precision Measurement, Providing Reliable Equipment for Manufacturing Industry
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AtomMax
Using micro-cantilever probe structures, this instrument enables 3D morphology characterization of conductive, semiconductive, and insulating solid materials, achieving wafer-level large-sample morphology characterization. Combined with an optical image, the electrically driven sample positioning stage allows for 1 μm positioning accuracy within a 200 x 200 mm area. with fully automated operations for laser alignment, probe approach, and scanning parameter adjust.ments.
| Parameter | Specification |
|---|---|
| Sample Size | Compatible with 8-inch wafers and below |
| Scanning Range | Maximum 100μm * 100μm * 910μm |
| Scanning Angle | 0~360" |
| Resolution | Z-axis closed-loop resolution 0.15 nm; X/Y closed-loop resolution 0.5 nm |
| Scanning Probe XY Direction lmage Resolution | Not less than 32x32~4000x4000 |
| Operating Modes | Contact mode, tapping mode, phase imaging mode, lift mode, multi-directional scanning mode |
| Multi-Function Measurement | EFM,KFM,PFM,MFM |
